G01P- MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT.H01H1/0036- Switches making use of microelectromechanical systems.H01H- ELECTRIC SWITCHES RELAYS SELECTORS EMERGENCY PROTECTIVE DEVICES.229910021420 polycrystalline silicon Inorganic materials 0.000 description 4.238000006011 modification reaction Methods 0.000 description 4.238000005516 engineering process Methods 0.000 description 6.238000006073 displacement reaction Methods 0.000 description 6.XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2.239000010703 silicon Substances 0.000 claims description 4.229910052710 silicon Inorganic materials 0.000 claims description 4.238000004519 manufacturing process Methods 0.000 claims description 8.230000005484 gravity Effects 0.000 claims abstract description 88.239000000758 substrate Substances 0.000 claims abstract description 138.Application granted granted Critical Publication of US7999201B2 publication Critical patent/US7999201B2/en Status Active legal-status Critical Current Adjusted expiration legal-status Critical Links ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). reassignment SHANDONG GETTOP ACOUSTIC CO. Assignors: CAO, XIN PING, ZHE, WANG Publication of US20100108478A1 publication Critical patent/US20100108478A1/en Assigned to SHANDONG GETTOP ACOUSTIC CO. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by Shandong Gettop Acoustic Co Ltd filed Critical Shandong Gettop Acoustic Co Ltd Priority to US12/291,106 priority Critical patent/US7999201B2/en Assigned to SILICON MATRIX PTE. Original Assignee Shandong Gettop Acoustic Co Ltd Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Wang Zhe Xin Ping Cao Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Active, expires Application number US12/291,106 Other versions US20100108478A1
#Gswitch with more than 2 pdf
Google Patents US7999201B2 - MEMS G-switch deviceĭownload PDF Info Publication number US7999201B2 US7999201B2 US12/291,106 US29110608A US7999201B2 US 7999201 B2 US7999201 B2 US 7999201B2 US 29110608 A US29110608 A US 29110608A US 7999201 B2 US7999201 B2 US 7999201B2 Authority US United States Prior art keywords driving stages moveable mems switch substrate Prior art date Legal status (The legal status is an assumption and is not a legal conclusion.
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